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Title:
レジスト用共重合体の共重合組成分布の分析方法
Document Type and Number:
Japanese Patent JP4632345
Kind Code:
B2
Inventors:
百瀬 陽
藤原 匡之
右手 浩一
北山 辰樹
Application Number:
JP2004142429A
Publication Date:
February 23, 2011
Filing Date:
May 12, 2004
Export Citation:
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Assignee:
三菱レイヨン株式会社
International Classes:
G01N30/34; G01N33/44; B01J20/286; C08F220/18; C08F220/28; G01N30/26; G01N30/54; G01N30/62; G01N30/74; G01N30/88
Domestic Patent References:
JP2002145954A
JP2001201856A
JP2003246825A
JP2003140346A
JP2003207490A
Foreign References:



 
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