Title:
シリンダ形プラットフォームおよびラスタ走査される放射線ビームを使用して光学的微細構造体を形成するためのシステムおよび方法
Document Type and Number:
Japanese Patent JP4635006
Kind Code:
B2
Abstract:
Microstructures are fabricated by impinging a radiation beam, such as a laser beam, through a substrate that is transparent to the laser beam, into a negative photoresist layer on the substrate. The negative photoresist layer may be subsequently developed to provide a master for optical and/or mechanical microstructures. Related systems, microstructure products and microstructure masters also are disclosed.
Inventors:
Fleece, robert pee
Reinhardt, Thomas A
Wood, Robert El
Reinhardt, Thomas A
Wood, Robert El
Application Number:
JP2006526111A
Publication Date:
February 16, 2011
Filing Date:
August 20, 2004
Export Citation:
Assignee:
Bright View Technologies, Inc.
International Classes:
G03F7/20; B29C59/16; B29D11/00; B82B1/00; B82B3/00; G02B3/00; G02B5/18; G03F7/00; G03F7/24
Domestic Patent References:
| JP2004280017A | ||||
| JP2000103062A | ||||
| JP2002537636A |
Attorney, Agent or Firm:
Shoichi Okuyama
Arihara Koichi
Matsushima Tetsuo
Arihara Koichi
Matsushima Tetsuo