Title:
基盤洗浄装置
Document Type and Number:
Japanese Patent JP4636659
Kind Code:
B2
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Inventors:
Kazutoshi Yamazaki
Application Number:
JP2000241312A
Publication Date:
February 23, 2011
Filing Date:
August 09, 2000
Export Citation:
Assignee:
Sekisui Chemical Co.,Ltd.
International Classes:
B08B3/08; H01L21/304
Domestic Patent References:
| JP6099197A | ||||
| JP2000037695A | ||||
| JP2000015272A | ||||
| JP2000509329A |