Title:
シール組立体の改良
Document Type and Number:
Japanese Patent JP4637092
Kind Code:
B2
Abstract:
A seal assembly for the protection of a static seal device for use in a vacuum pump. The seal assembly comprising at least two components which are sealingly connected together, an o-ring seal, which is engaged between the two components to prevent transfer of fluid to and from the pump between these two components and a fluid channel. The fluid channel being in the plane of the o-ring and located between the o-ring seal and a process gas flow path. The fluid channel provides a path for a barrier gas to be routed when the apparatus is in use. The channel being connectable to an external source of barrier fluid and having an outlet in fluid communication with the pump swept volume.
Inventors:
Birch peter hugh
Tarrell David Alan
Gray Malcolm William
Turner Neil
Tarrell David Alan
Gray Malcolm William
Turner Neil
Application Number:
JP2006506225A
Publication Date:
February 23, 2011
Filing Date:
May 06, 2004
Export Citation:
Assignee:
Edwards Limited
International Classes:
F04C27/00; F01C21/10; F04C18/18; F04C23/00; F04C27/02; F04C29/00; F04C18/12
Domestic Patent References:
| JP3162647B2 | ||||
| JP10266956A | ||||
| JP7133793A |
Foreign References:
| US20020155014 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato