Title:
基板の処理装置
Document Type and Number:
Japanese Patent JP4641168
Kind Code:
B2
Abstract:
The objective of the present invention is to provide a processor whose rigidity improved without thickening a plate forming a processing tank. The processor for processing a substrate is provided with: the processing tank which is formed in a box shape where an upper face is opened by the plate, and in which a take-in port of the substrate is made on one side face and a take-out port on the other side face; a reinforcement frame which is integrally installed along an outer peripheral face at an upper part of the processing tank and forms the processing tank; and a lid member which is fitted to the reinforcement frame so that it can turn and opens/closes an upper opening of the processing tank.
Inventors:
Hideki Sueyoshi
Akinori Iso
Akinori Iso
Application Number:
JP2004275755A
Publication Date:
March 02, 2011
Filing Date:
September 22, 2004
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
H01L21/304; B65G49/06; G02F1/1333; H01L21/027; H01L21/677
Domestic Patent References:
| JP3284386A | ||||
| JP2003260422A | ||||
| JP2004140336A | ||||
| JP9320998A | ||||
| JP8318169A |
Foreign References:
| WO2001003167A1 |
Attorney, Agent or Firm:
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu