Title:
プローブカード
Document Type and Number:
Japanese Patent JP4642603
Kind Code:
B2
Inventors:
Shuichi Tsukada
Yonezawa Toshihiro
Yonezawa Toshihiro
Application Number:
JP2005244800A
Publication Date:
March 02, 2011
Filing Date:
August 25, 2005
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01R1/073; H01L21/66
Domestic Patent References:
| JP2004205487A | ||||
| JP2004077153A | ||||
| JP2005164600A | ||||
| JP2002531836A | ||||
| JP2002267687A |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Miaki Kametani
Koji Hagiwara