Title:
耐脆化性に優れたゲート酸化膜形成用シリサイドターゲット及び同シリサイドターゲット製造方法
Document Type and Number:
Japanese Patent JP4642813
Kind Code:
B2
Inventors:
Kunihiro Oda
Hirohito Miyashita
Hirohito Miyashita
Application Number:
JP2007158630A
Publication Date:
March 02, 2011
Filing Date:
June 15, 2007
Export Citation:
Assignee:
jx Nippon Mining & Metals Co., Ltd.
International Classes:
C23C14/34; C04B35/58; H01L21/316
Domestic Patent References:
| JP11135774A | ||||
| JP3187955A | ||||
| JP2000080468A | ||||
| JP2000064032A | ||||
| JP116060A | ||||
| JP61178474A |
Attorney, Agent or Firm:
Isamu Ogoshi