Title:
DLC膜の成膜方法およびDLC成膜物
Document Type and Number:
Japanese Patent JP4653964
Kind Code:
B2
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Inventors:
Yoshimi Nishimura
Yatsuka
Yatsuka
Application Number:
JP2004112718A
Publication Date:
March 16, 2011
Filing Date:
April 07, 2004
Export Citation:
Assignee:
Kurita Manufacturing Co., Ltd.
International Classes:
C23C16/27
Domestic Patent References:
| JP2002246455A | ||||
| JP2000319784A | ||||
| JP2003239978A |
Other References:
バイポーラ・パルスを利用したPBII法によるDLC膜コーティング,第17回イオン注入表層処理シンポジウム,2001年11月30日
Attorney, Agent or Firm:
Osamu Kono