Title:
熱処理装置及びその方法
Document Type and Number:
Japanese Patent JP4655395
Kind Code:
B2
Inventors:
Shaoju
Tetsuya Nakano
Kazuhiko Imamura
Tetsuya Nakano
Kazuhiko Imamura
Application Number:
JP2001085079A
Publication Date:
March 23, 2011
Filing Date:
March 23, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/46; H01L21/31
Domestic Patent References:
| JP2000054145A | ||||
| JP4177831A | ||||
| JP4171944A | ||||
| JP2000173945A | ||||
| JP11204518A | ||||
| JP9064307A | ||||
| JP5335239A | ||||
| JP3203317A | ||||
| JP2009116A | ||||
| JP10032169A | ||||
| JP11329975A | ||||
| JP2000331939A | ||||
| JP4133428U | ||||
| JP8139079A | ||||
| JP5271950A |
Attorney, Agent or Firm:
Toshio Inoue