Title:
半導体装置の作製方法
Document Type and Number:
Japanese Patent JP4656843
Kind Code:
B2
Inventors:
Shunpei Yamazaki
Yasuko Watanabe
Yasuyuki Arai
Yasuko Watanabe
Yasuyuki Arai
Application Number:
JP2004008872A
Publication Date:
March 23, 2011
Filing Date:
January 16, 2004
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
B41J2/01; H01L29/786; G03F7/38; H01L21/027; H01L21/288; H01L21/3205; H01L21/336
Domestic Patent References:
| JP4282839A | ||||
| JP2139972A | ||||
| JP6182980A | ||||
| JP2002318394A | ||||
| JP2002107744A |