Title:
高温高湿用空調システム
Document Type and Number:
Japanese Patent JP4657530
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To sustain specified temperature and humidity in a high temperature high humidity chamber without requiring a cooler dedicated to dehumidification. SOLUTION: Air from a clean room 1 and return air from a high temperature high humidity chamber R are mixed in a processing chamber 21, heated by means of an electric heater 23, and humidified in the humidifying section 25a of an electric heating steam humidifier 25 before being supplied to the high temperature high humidity chamber R through a HEPA filter 27.
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Inventors:
Sueyasu Michihisa
Shiokawa
Shiokawa
Application Number:
JP2001271514A
Publication Date:
March 23, 2011
Filing Date:
September 07, 2001
Export Citation:
Assignee:
Takasago Thermal Engineering Co., Ltd.
International Classes:
F24F3/153; F24F7/06; F24F11/02
Domestic Patent References:
JP4084963A | ||||
JP8296876A | ||||
JP9152153A | ||||
JP8193727A | ||||
JP10148383A | ||||
JP5093542A |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Kenji Wada
Miaki Kametani
Koji Hagiwara
Kenji Wada