Title:
接合装置
Document Type and Number:
Japanese Patent JP4659112
Kind Code:
B1
Inventors:
Takeshi Tsuno
Masato Kinouchi
Takayuki Goto
Suzuki Takenori
Kensuke Ide
Masato Kinouchi
Takayuki Goto
Suzuki Takenori
Kensuke Ide
Application Number:
JP2009223298A
Publication Date:
March 30, 2011
Filing Date:
September 28, 2009
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
H01L21/02; H01L21/683
Domestic Patent References:
| JP2009212491A | ||||
| JP2009212490A | ||||
| JP2009212489A | ||||
| JP2009208150A | ||||
| JP2009010263A | ||||
| JP2008294098A | ||||
| JP2007281166A | ||||
| JP2005079353A | ||||
| JP2004342855A | ||||
| JP2004337927A | ||||
| JP2002050861A |
Foreign References:
| WO2009107250A1 |
Attorney, Agent or Firm:
Minoru Kudo
Keisaku Nakao
Keisaku Nakao