Title:
照明装置及びこれに用いる投影露光装置並びにデバイスの製造方法
Document Type and Number:
Japanese Patent JP4659223
Kind Code:
B2
Abstract:
An illumination apparatus includes an inner-surface reflecting type integrator, an optical system for directing a beam from a light source to a portion of incidence of the inner-surface reflecting type integrator, an wave-front splitting type integrator, an image-forming optical system for arranging the portion of incidence of the inner-surface reflecting type integrator approximately conjugate with a portion of incidence of the wave-front splitting type integrator, and for directing a beam from the beam mixer to the wave-front splitting type integrator, and an irradiating optical system for superimposing multiple beams from the wave-front splitting type integrator on a plane to be irradiated, wherein a stop is provided at or near the portion of exit of the inner-surface reflecting type integrator.
Inventors:
Satoshi Mizouchi
Application Number:
JP2001006809A
Publication Date:
March 30, 2011
Filing Date:
January 15, 2001
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; G03F7/20; G03F7/22; G01N21/95; G01N21/956
Domestic Patent References:
| JP11054426A | ||||
| JP5251308A | ||||
| JP2000269114A | ||||
| JP10270312A | ||||
| JP6061121A |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa