Title:
レーザ加工方法
Document Type and Number:
Japanese Patent JP4659301
Kind Code:
B2
Inventors:
Fukuyo Bunji
Kenji Fukumitsu
Naomi Uchiyama
Toshimitsu Wakuda
Kenji Fukumitsu
Naomi Uchiyama
Toshimitsu Wakuda
Application Number:
JP2001277186A
Publication Date:
March 30, 2011
Filing Date:
September 12, 2001
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
B28D5/00; B23K26/00; B23K26/046; B23K26/38; B23K26/40; C03B33/09; H01L21/301; B23K101/42
Domestic Patent References:
| JP3124486A | ||||
| JP4167985A | ||||
| JP11163403A | ||||
| JP9260310A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Tatsuya Shioda
Shiro Terasaki
Tatsuya Shioda
Shiro Terasaki