Title:
基板等の乾燥方法および乾燥装置
Document Type and Number:
Japanese Patent JP4662453
Kind Code:
B2
Inventors:
Kenji Takashima
Application Number:
JP2005120788A
Publication Date:
March 30, 2011
Filing Date:
April 19, 2005
Export Citation:
Assignee:
E-square Co., Ltd.
International Classes:
H01L21/304; B08B7/00; F26B5/14; H05H1/24
Domestic Patent References:
| JP200393869A | ||||
| JP20029037A | ||||
| JP6112188A | ||||
| JP11290750A |
Attorney, Agent or Firm:
Shogo Sano
Kiyoshi Samukawa
Kiyoshi Samukawa