Title:
金属柱の形成方法
Document Type and Number:
Japanese Patent JP4667737
Kind Code:
B2
Inventors:
Kazuhisa Takao
Akihiko Nakamura
Akihiko Nakamura
Application Number:
JP2003398412A
Publication Date:
April 13, 2011
Filing Date:
November 28, 2003
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
C23C16/507; H05H1/46; H01L21/28; H01L21/288; H01L21/3065; H01L21/3205; H01L21/60; H01L23/52
Domestic Patent References:
| JP228934A | ||||
| JP7135097A | ||||
| JP11233545A | ||||
| JP2003533014A |
Attorney, Agent or Firm:
Yu Koyama