Title:
フォトリソグラフィシミュレーションによるレティクル検査方法及びシステム
Document Type and Number:
Japanese Patent JP4668401
Kind Code:
B2
Abstract:
A system and method are presented for optical inspection of reticles by simulating the operation of a selected stepper. The system utilizes a flying spot inspection technique and includes a scanning apparatus and a detection unit. The scanning apparatus uses a laser source similar to that of the stepper of interest. First and second light directing assemblies are accommodated in the optical paths of, respectively, incident and transmitted light, and are designed so as to provide coherence of the light substantially equal to that of the stepper.
Inventors:
Avnel Carpole
Boaz Canaan
Boaz Canaan
Application Number:
JP2000309917A
Publication Date:
April 13, 2011
Filing Date:
September 04, 2000
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
G01N21/956; G03F1/84; G03F7/20
Domestic Patent References:
| JP7028226A | ||||
| JP5066556A | ||||
| JP3266844A | ||||
| JP61260211A | ||||
| JP5249656A | ||||
| JP8162511A |
Attorney, Agent or Firm:
Minoru Nakamura
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Hideto Takeuchi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Hideto Takeuchi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda