Title:
表面欠陥検査方法および表面欠陥検査装置
Document Type and Number:
Japanese Patent JP4670180
Kind Code:
B2
More Like This:
Inventors:
Kiyoshi Yoshida
Noritaka Usui
Noritaka Usui
Application Number:
JP2001149316A
Publication Date:
April 13, 2011
Filing Date:
May 18, 2001
Export Citation:
Assignee:
Nissan Motor Co., Ltd
International Classes:
G01B11/22; G01N21/88; G01B11/24; G01B11/30; G01N21/84
Domestic Patent References:
| JP4479073B2 | ||||
| JP11108641A | ||||
| JP11072439A | ||||
| JP8029359A | ||||
| JP7027717A | ||||
| JP6213823A | ||||
| JP7055716A | ||||
| JP61093934A | ||||
| JP6123707A |
Attorney, Agent or Firm:
Janggi Motonori