Title:
露光装置及び露光方法、並びにデバイス製造方法
Document Type and Number:
Japanese Patent JP4671051
Kind Code:
B2
Abstract:
Of a measurement stage (MST) that has a plate (101) on which liquid is supplied, and performs measurement related to exposure via a projection optical system (PL) and a liquid (Lq), at least a part of the measurement stage including the plate can be exchanged. Therefore, by exchanging at least a part of the measurement stage including the plate before the surface of the plate deteriorates due to contact with the liquid, measurement related to exposure can be performed constantly with high precision, which makes it possible to maintain exposure with high precision. Further, in the case at least one edge surface of the plate is mirror-polished, when at least a part of the measurement section including the plate is exchanged to a new component, the position of the plate can be accurately measured, for instance, by an interferometer or the like via the edge surface of the plate that has been mirror-polished, even if the position of the component that has been exchanged is roughly set.
Inventors:
Yuichi Shibasaki
Application Number:
JP2006511515A
Publication Date:
April 13, 2011
Filing Date:
March 25, 2005
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP2002202221A | 2002-07-19 | |||
| JP2000283889A | 2000-10-13 | |||
| JPH0684757A | 1994-03-25 | |||
| JP2000164504A | 2000-06-16 | |||
| JPH11135400A | 1999-05-21 | |||
| JPH1187237A | 1999-03-30 | |||
| JP2004061177A | 2004-02-26 | |||
| JP2005079587A | 2005-03-24 |
Foreign References:
| WO2005081291A1 | ||||
| WO2005074014A1 | ||||
| WO2004090577A1 |
Attorney, Agent or Firm:
Atsushi Tateishi