Title:
基板搬送装置及び外観検査装置
Document Type and Number:
Japanese Patent JP4671573
Kind Code:
B2
Abstract:
A defect detecting apparatus comprising an illuminating unit which irradiates an object with illumination an image sensing unit which senses an image of the object an angle controller which controls an inclination angle of at least one of the illuminating unit and the image sensing unit, an image processor which senses images of the object while the angle controller changes the inclination angle of at least one of the illuminating unit and the image sensing unit and obtains a relationship between each inclination angle and optical information corresponding to the each inclination angle, and a determination unit which determines an image sensing condition suited to observation in accordance with the relationship wherein the angle controller sets the inclination angle of the illuminating unit or the image sensing unit on the basis of a determination result from the determination unit such that the inclination angle matches the image sensing condition.
Inventors:
Komuro
Haruyuki Tsuji
Miura Yasutada
Toshihiko Tanaka
Haruyuki Tsuji
Miura Yasutada
Toshihiko Tanaka
Application Number:
JP2001569259A
Publication Date:
April 20, 2011
Filing Date:
March 23, 2001
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
G01N21/956; G01B11/06; G01B11/30; G01N21/95; G01N21/958; G06T1/00; H01L21/00; H01L21/66
Domestic Patent References:
| JPH0961365A | 1997-03-07 | |||
| JPH10339701A | 1998-12-22 | |||
| JPH11166901A | 1999-06-22 | |||
| JPH116803A | 1999-01-12 | |||
| JPH1172443A | 1999-03-16 | |||
| JPH08264605A | 1996-10-11 | |||
| JPH0961365A | 1997-03-07 | |||
| JPH10339701A | 1998-12-22 | |||
| JPH11166901A | 1999-06-22 | |||
| JPH116803A | 1999-01-12 | |||
| JPH1172443A | 1999-03-16 | |||
| JPH08264605A | 1996-10-11 |
Attorney, Agent or Firm:
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura