Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4672436
Kind Code:
B2
Inventors:
Wakamatsu Teiji
Hisazo Nakamura
Masashi Kikuchi
Yosuke Jimbo
Yasuo Shimizu
Kazuya Saito
Hisazo Nakamura
Masashi Kikuchi
Yosuke Jimbo
Yasuo Shimizu
Kazuya Saito
Application Number:
JP2005148574A
Publication Date:
April 20, 2011
Filing Date:
May 20, 2005
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H01L21/205; C23C16/505; H01L21/3065
Domestic Patent References:
| JP2004363552A | ||||
| JP2005019508A |
Attorney, Agent or Firm:
Takao Hamano
Teruichi Hirai
Teruichi Hirai