Title:
光学装置
Document Type and Number:
Japanese Patent JP4673955
Kind Code:
B2
Inventors:
Toyohiko Yatagaki
Masahide Ito
Hiroshi Ishiwatari
Masahide Ito
Hiroshi Ishiwatari
Application Number:
JP2000088580A
Publication Date:
April 20, 2011
Filing Date:
March 24, 2000
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
G01N21/00; G02B21/00; G01N21/17; G01N21/45; G02B27/52
Domestic Patent References:
| JP9105864A | ||||
| JP6035946B2 |
Other References:
Hiroshi Ishiwata, Masahide Itoh, Toyohiko Yatagai,Retardation modulated differential interference microscope and its application to 3-D shape measurement,Proceedings of SPIE,米国,1996年10月29日,Vol.2873,pp.21-24
Attorney, Agent or Firm:
Yasushi Shinohara
Masayuki Fujinaka
Masayuki Fujinaka