Title:
薄厚ウエハ搬送用吸着ハンド
Document Type and Number:
Japanese Patent JP4678787
Kind Code:
B2
Inventors:
Akihide Takehara
Application Number:
JP2007112519A
Publication Date:
April 27, 2011
Filing Date:
April 23, 2007
Export Citation:
Assignee:
Fujikoshi Co., Ltd.
International Classes:
H01L21/677; B25J15/06; B65G49/07
Domestic Patent References:
| JP2006339574A | ||||
| JP2006318944A | ||||
| JP5251544A | ||||
| JP2001105261A | ||||
| JP2005262351A |
Attorney, Agent or Firm:
Akiko Okajima
Junji Kawachi
Junji Kawachi