Title:
結晶性制御酸化マグネシウム単結晶及びその製造方法並びにその単結晶を用いた基板
Document Type and Number:
Japanese Patent JP4686181
Kind Code:
B2
Abstract:
A magnesium oxide single crystal having controlled crystallinity has a subboundary, and ranges of variation of diffraction line positions, as measured for reciprocal lattice maps with respect to a region surrounded by the same subboundary, with the range of the variation of 1x10-3 to 2x10-2 degree of on Deltaomega coordinates, and with the range of the variation of 4x10-4 to 5x10-3 degree on 2theta coordinates.
Inventors:
Atsushi Azuma
Kawaguchi Yoshifumi
Kunishige Masaaki
Kawaguchi Yoshifumi
Kunishige Masaaki
Application Number:
JP2004380169A
Publication Date:
May 18, 2011
Filing Date:
December 28, 2004
Export Citation:
Assignee:
Tateho Chemical Industries Co., Ltd.
International Classes:
C30B29/16; C30B29/22; C30B33/02
Domestic Patent References:
| JP6305887A | ||||
| JP200086400A |
Attorney, Agent or Firm:
Hajime Tsukuni
Fumio Shinoda
Koshiro Tsukuda
Fumio Shinoda
Koshiro Tsukuda