Title:
スペーサ形成方法及び装置
Document Type and Number:
Japanese Patent JP4690031
Kind Code:
B2
Inventors:
Hiroto Uchida
Feather Koji
Hiroshi Koshina
Takanori Tsuji
Shinro Murata
Mitsuru Yahagi
Junpei Yuyama
Feather Koji
Hiroshi Koshina
Takanori Tsuji
Shinro Murata
Mitsuru Yahagi
Junpei Yuyama
Application Number:
JP2004373483A
Publication Date:
June 01, 2011
Filing Date:
December 24, 2004
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G02F1/1339
Domestic Patent References:
| JP2003266671A | ||||
| JP2001188235A | ||||
| JP2004037855A | ||||
| JP2004175037A |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Yasuo Iisaka
Ori Akira
Yasuo Iisaka