Title:
ヒータ
Document Type and Number:
Japanese Patent JP4690297
Kind Code:
B2
Inventors:
Yuji Morikawa
Matsui Nobuhiko
Akinobu Otaka
Takeshi Higuchi
Kensuke Fujimura
Matsui Nobuhiko
Akinobu Otaka
Takeshi Higuchi
Kensuke Fujimura
Application Number:
JP2006325214A
Publication Date:
June 01, 2011
Filing Date:
December 01, 2006
Export Citation:
Assignee:
Momentive Performance Materials Japan LLC
International Classes:
H05B3/22; H01L21/205; H05B3/68; C23C16/46
Domestic Patent References:
| JP7106261A | ||||
| JP2005340439A | ||||
| JP2005217317A | ||||
| JP5685851U | ||||
| JP4856643U | ||||
| JP6163792U | ||||
| JP5669894U | ||||
| JP7113586A |
Attorney, Agent or Firm:
▲桑▼原 史生