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Title:
表面評価装置及び表面評価方法
Document Type and Number:
Japanese Patent JP4690584
Kind Code:
B2
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Inventors:
Toshihiko Kataoka
Katsuo Wada
Application Number:
JP2001170473A
Publication Date:
June 01, 2011
Filing Date:
June 06, 2001
Export Citation:
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Assignee:
Unatech Co., Ltd.
International Classes:
G01B11/30; G01N21/956; G02B21/06; G02B21/36; H01L21/66
Domestic Patent References:
JP2001015567A
JP2000162141A
JP11281543A
JP11281337A
JP11190702A
JP11108847A
JP11067134A
JP9172044A
JP8304296A
JP1117024A
Attorney, Agent or Firm:
Yoshiyuki Kawaguchi
Hidemi Matsukura
Takehiko Sekine
Kawashima Masaaki



 
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