Title:
炭化珪素単結晶育成用種結晶及びその製造方法並びに炭化珪素単結晶の製造方法
Document Type and Number:
Japanese Patent JP4690906
Kind Code:
B2
Inventors:
Noboru Otani
Masakazu Katsuno
Hiroshi Tsuge
Masashi Nakabayashi
Tatsuo Fujimoto
Hirokatsu Yashiro
Mitsuru Sawamura
Takashi Aigo
Taizo Hoshino
Masakazu Katsuno
Hiroshi Tsuge
Masashi Nakabayashi
Tatsuo Fujimoto
Hirokatsu Yashiro
Mitsuru Sawamura
Takashi Aigo
Taizo Hoshino
Application Number:
JP2006043739A
Publication Date:
June 01, 2011
Filing Date:
February 21, 2006
Export Citation:
Assignee:
Nippon Steel Corporation
International Classes:
C30B29/36; C30B25/18
Domestic Patent References:
| JP2005239496A | ||||
| JP2001181095A | ||||
| JP2003176200A | ||||
| JP2002121099A | ||||
| JP63319294A | ||||
| JP10125905A |
Attorney, Agent or Firm:
Katsuo Naruse
Tomohiro Nakamura
Masashi Torino
Kazuya Sasaki
Tomohiro Nakamura
Masashi Torino
Kazuya Sasaki