Title:
ポンプおよびポンプ部材の製造方法
Document Type and Number:
Japanese Patent JP4694771
Kind Code:
B2
Abstract:
A vacuum pump having a high corrosion resistance is disclosed. A member constituting the vacuum pump is composed of aluminum or an aluminum alloy, and the surface of the member is subjected to a plasma oxidation treatment such as an oxidation treatment using oxygen radicals, so that a dense and smooth aluminum oxide coating film is formed thereon.
Inventors:
Tadahiro Ohmi
Yasuyuki Shirai
Kitano Masashi
Yasuyuki Shirai
Kitano Masashi
Application Number:
JP2003066689A
Publication Date:
June 08, 2011
Filing Date:
March 12, 2003
Export Citation:
Assignee:
International Science Foundation
International Classes:
F04B39/00; F04B37/16; F04C18/16; F04C25/02; F04C29/00
Domestic Patent References:
| JP2002257040A | ||||
| JP729898A | ||||
| JP63270536A | ||||
| JP2002285317A | ||||
| JP2002161326A | ||||
| JP4272149A | ||||
| JP3500550A | ||||
| JP1024041A | ||||
| JP11043734A |
Attorney, Agent or Firm:
Kenho Ikeda
Shuichi Fukuda
Shuichi Fukuda