Title:
非対称瞳照射を補償するフィルタ装置
Document Type and Number:
Japanese Patent JP4700697
Kind Code:
B2
Abstract:
The invention relates to a filter device for an illumination system, especially for the correction of the illumination of the illuminating pupil, comprising a light source, with the illumination system being passed through by a bundle of illuminating rays from the light source to an object plane, with the bundle of illuminating rays impinging upon the filter device, comprising at least one filter element which can be introduced into the beam path of the bundle of illuminating rays, with the filter element comprising an actuating device, so that the filter element can be brought with the help of the actuating device into the bundle of illuminating rays.
Inventors:
Maulman fred
Fiorca damian
Fiorca damian
Application Number:
JP2007547201A
Publication Date:
June 15, 2011
Filing Date:
August 25, 2005
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G02B26/02; G03F7/20
Domestic Patent References:
| JP2004128449A | ||||
| JP2005510861A | ||||
| JP2003178969A | ||||
| JP59028337A |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda