Title:
半導体装置
Document Type and Number:
Japanese Patent JP4701886
Kind Code:
B2
Inventors:
Hiroshi Shimabukuro
Yoshihiro Shigeta
Yoshihiro Shigeta
Application Number:
JP2005203884A
Publication Date:
June 15, 2011
Filing Date:
July 13, 2005
Export Citation:
Assignee:
Fuji Electric Systems Co., Ltd.
International Classes:
H01L27/06; H01L21/822; H01L21/8234; H01L27/04; H01L29/78; H01L29/861
Domestic Patent References:
| JP10041402A | ||||
| JP11330453A | ||||
| JP3073567A | ||||
| JP11154855A | ||||
| JP5160348A | ||||
| JP58138074A |
Attorney, Agent or Firm:
Yoichi Matsumoto