Title:
XYθ移動ステージ
Document Type and Number:
Japanese Patent JP4702083
Kind Code:
B2
Abstract:
This invention relates to an XY θ moving carrier which may not be swayed when the flat plate is loaded eccentrically. A flat plate for retaining work piece is provided, wherein the flat plate on the XY θ moving carrier is capable of moving along the X and Y directions on the plate surface and rotating around θ axis perpendicular to the plate surface. The present invention comprises a carrier base, push generating means fixed on the carrier base having magnetic poles for producing a moving magnetic field; three basis supporting members fixed on the carrier base; and more than one auxiliary supporting members fixed on the carrier base. While the flat plate is supported by the three basis supporting members and more than one auxiliary supporting members, square plates having grid-type poles are provided on the side opposite to the work piece to actuate the XY θ moving carrier by the push generating means.
Inventors:
Yoneta Tanaka
Application Number:
JP2006034071A
Publication Date:
June 15, 2011
Filing Date:
February 10, 2006
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
G03F7/20; H01L21/027; H01L21/68
Domestic Patent References:
| JP5254108A | ||||
| JP6289467A | ||||
| JP62100161A | ||||
| JP3112393A | ||||
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Foreign References:
| WO1999004481A1 |
Attorney, Agent or Firm:
Koji Shichijo