Title:
表面検査方法およびそれを用いた検査装置
Document Type and Number:
Japanese Patent JP4703671
Kind Code:
B2
Abstract:
If an illuminance of a measurement spot is limited in order to prevent heat damage on an article to be inspected, since detection sensitivity and a detection speed are in a relation of trade-off, it is difficult to improve one of them without sacrificing the other or to improve both of them. Also, there is a problem that the detection sensitivity is lowered on an outer circumference portion than on an inner circumference portion of the article to be inspected. A plurality of measurement units comprising an illumination optics, a measurement spot, a collection optics, and a light detection optics are provided, inspection results obtained from the plurality of measurement spots are integrated, and light-amount distribution to each measurement spot is controlled according to a scan radial position.
Inventors:
Matsui Shigeru
Application Number:
JP2008045737A
Publication Date:
June 15, 2011
Filing Date:
February 27, 2008
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01N21/956
Domestic Patent References:
| JP62153737A | ||||
| JP2007309713A | ||||
| JP2002188999A | ||||
| JP7146245A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation