Title:
ダイヤフラム弁および基板処理装置
Document Type and Number:
Japanese Patent JP4705490
Kind Code:
B2
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Inventors:
Norihiro Ito
Takayuki Okamura
Kei Takeshi
Nobuhiko Mohri
Takayuki Okamura
Kei Takeshi
Nobuhiko Mohri
Application Number:
JP2006064422A
Publication Date:
June 22, 2011
Filing Date:
March 09, 2006
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F16K17/02; F16K7/17; F16K17/06; F16K51/00; H01L21/3065
Domestic Patent References:
| JP2007078019A | ||||
| JP2031957U | ||||
| JP5075558U | ||||
| JP48039643Y1 | ||||
| JP2004273553A | ||||
| JP2004031654A | ||||
| JP2002353184A |
Attorney, Agent or Firm:
Kenji Yoshitake
Hiroyuki Nagai
Junpei Okada
Hirohito Katsunuma
Hiroki Kashima
Hiroyuki Nagai
Junpei Okada
Hirohito Katsunuma
Hiroki Kashima