Title:
不要層のエッチング除去方法及び装置
Document Type and Number:
Japanese Patent JP4706695
Kind Code:
B2
Inventors:
Hideki Asahara
Katsuyuki Kurachi
Makoto Hasegawa
Kenya Karame
Katsuyuki Kurachi
Makoto Hasegawa
Kenya Karame
Application Number:
JP2007314412A
Publication Date:
June 22, 2011
Filing Date:
December 05, 2007
Export Citation:
Assignee:
tdk Corporation
International Classes:
H01L21/306; C23F1/00; C23F1/08; C23F1/18
Domestic Patent References:
| JP2004158801A | ||||
| JP56126479U |
Attorney, Agent or Firm:
Keiichi Yamamoto