Title:
洗浄ユニット、これを有するコーティング装置及び方法
Document Type and Number:
Japanese Patent JP4708726
Kind Code:
B2
Abstract:
A cleaning unit of this invention includes a body and a cleaning member. The body includes an upper face. The upper face subsides to form a receiving recession for receiving a slit nozzle of the slit coater. The receiving recession includes a sidewall and a bottom face. The sidewall includes a first injection hole. A cleaning material is sprayed via the injection hole. The cleaning member eliminates dregs of the material attached on the slit nozzle of the slit coater. The cleaning member is attached on the bottom face of the receiving recession. According to the present invention, the slit nozzle is effectively cleared, so that the substrate is uniformly coated with the photosensitive layer, and the photosensitive layer is not scratched.
Inventors:
Ginger Homin
Chung formation
Chung formation
Application Number:
JP2004127602A
Publication Date:
June 22, 2011
Filing Date:
April 23, 2004
Export Citation:
Assignee:
Samsung Electronics Co.,Ltd.
International Classes:
B05C5/02; B05B15/02; G02F1/13; B05C11/10; B05D3/00; B08B3/02
Domestic Patent References:
| JP7080385A | ||||
| JP11300261A | ||||
| JP11239750A | ||||
| JP3306838B2 | ||||
| JP5006854A | ||||
| JP5013320A | ||||
| JP5055133A | ||||
| JP9115821A | ||||
| JP10270358A | ||||
| JP2001232250A | ||||
| JP2002166209A | ||||
| JP11329955A |
Foreign References:
| US3933186 | ||||
| US20040213913 | ||||
| US7473318 |
Attorney, Agent or Firm:
Yukio Ono
Tomoko Inazumi
Tomoko Inazumi