Title:
レポート検索方法,レポート検索システム、およびレビュー装置
Document Type and Number:
Japanese Patent JP4709168
Kind Code:
B2
Abstract:
An object of the present invention is to provide a report search method, and a reviewing apparatus by which a measure against abnormalities such as a defect of a sample may be quickly obtained by searching desired information in a report recording past information. In order to achieve the above object, the present invention has a configuration in which an image of a defective appearance and supplementary information on the image are memorized as a report file as one unit in a database for an observation result of the defective appearance of a sample in a manufacturing process, the supplementary information is searched as a search target among a plurality of report files memorized in the database by use of a search condition set from among the supplementary information, when a new defective appearance is generated, and the searched supplementary information and an image related with the supplementary information are output.
Inventors:
Dai Hirai
Aoki Kazuo
Naoma Saka
Aoki Kazuo
Naoma Saka
Application Number:
JP2007000020A
Publication Date:
June 22, 2011
Filing Date:
January 04, 2007
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G05B19/418; G06F17/30; G06Q50/00; G06Q50/04; H01L21/66
Domestic Patent References:
| JP1196384A | ||||
| JP200625156A |
Attorney, Agent or Firm:
Manabu Inoue