Title:
熱屈曲アクチュエータの製造方法
Document Type and Number:
Japanese Patent JP4711514
Kind Code:
B2
Abstract:
A method of manufacture of a thermal bend actuator, the method comprising the steps of: (a) depositing and etching, using a first mask, a first material on a substrate to form a first conductive layer; (b) depositing and etching, using a second mask, a second material on the substrate to form a first sacrificial layer in a manner such that at least a portion of the first conductive layer remains uncovered; (c) depositing and etching, using a third mask, a third material on the substrate to form a first conductive bend actuator layer in a manner such that the first bend actuator layer is in electrical contact with the uncovered portion of the first conductive layer for, in use, conductive heating of the first bend actuator layer; (d) depositing and etching, using a fourth mask, a fourth material on the substrate to form a second sacrificial layer in a manner such that the second sacrificial layer covers substantially the entire first bend actuator layer; (e) depositing and etching using a fifth mask, a fifth material on the substrate to form a second bend actuator layer; and (f) etching away the first and second sacrificial layers, thereby forming a first gap between the first and the second bend actuator layers and a second gap between the first actuator layer and the top surface of the underlying substrate.
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Inventors:
Silverbrook, Kaia
Application Number:
JP2000605524A
Publication Date:
June 29, 2011
Filing Date:
March 10, 2000
Export Citation:
Assignee:
SILVERBROOK RESEARCH PTY.LIMITED
International Classes:
B81C1/00; B41J2/045; B41J2/055; B41J2/14; B41J2/16; B81B3/00
Domestic Patent References:
| JP10067102A | ||||
| JP9239975A | ||||
| JP7314673A | ||||
| JP2002537132A |
Foreign References:
| WO1999003680A1 |
Attorney, Agent or Firm:
Michiharu Soga
Yutaka Ikeya
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Taizo Shiraishi
Yutaka Ikeya
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Taizo Shiraishi