Title:
二次電子増倍素子を使用した測定方法及び二次電子増倍素子を使用した装置
Document Type and Number:
Japanese Patent JP4714768
Kind Code:
B2
Inventors:
Akimichi Hitoshi
Kyoko Takeuchi
Yasushi Tsuji
Arakawa Ichiro
Kyoko Takeuchi
Yasushi Tsuji
Arakawa Ichiro
Application Number:
JP2008207324A
Publication Date:
June 29, 2011
Filing Date:
August 11, 2008
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G01N23/22; G01L21/30
Domestic Patent References:
| JP10185844A | ||||
| JP1135331A | ||||
| JP6331574A | ||||
| JP63193351U |
Attorney, Agent or Firm:
Yoshihiro Shimizu
Shinichi Abe
Yuji Tsujida
Shinichi Abe
Yuji Tsujida