Title:
気相成長用サセプタ、気相成長装置及び気相成長方法
Document Type and Number:
Japanese Patent JP4720692
Kind Code:
B2
Inventors:
Takahiro Arai
Tomohiro Akiyama
Yoshida Chisa
Tomohiro Akiyama
Yoshida Chisa
Application Number:
JP2006248917A
Publication Date:
July 13, 2011
Filing Date:
September 14, 2006
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
H01L21/683; C23C16/458; H01L21/205
Domestic Patent References:
| JP2004235439A | ||||
| JP4354119A | ||||
| JP2007294942A | ||||
| JP5304101A | ||||
| JP1258417A | ||||
| JP64054723A | ||||
| JP6151339A | ||||
| JP64033738U |
Attorney, Agent or Firm:
Mikio Yoshimiya