Title:
リソグラフィ装置および方法の照明器
Document Type and Number:
Japanese Patent JP4723605
Kind Code:
B2
Abstract:
An illuminator for a lithographic apparatus, the illuminator including an illumination mode defining element and a plurality of polarization modifiers, the polarization modifiers being moveable into or out of partial intersection with a radiation beam having an angular and spatial distribution as governed by an illumination mode defining element.
Inventors:
Klassen, Michelle, Francois, Uber
Van Grievenbroke, Hendricks, Robertus, Marie
Geha, Bernd, Peter
Schmidt-Waver, Emil, Peter
Van Grievenbroke, Hendricks, Robertus, Marie
Geha, Bernd, Peter
Schmidt-Waver, Emil, Peter
Application Number:
JP2008057590A
Publication Date:
July 13, 2011
Filing Date:
March 07, 2008
Export Citation:
Assignee:
AS M Netherlands B.V.
Carl Zeiss SGM Gaehha
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
| JP2005167254A | ||||
| JP2006005319A | ||||
| JP2007220767A | ||||
| JP2008060546A |
Foreign References:
| WO2006077849A1 | ||||
| WO2005041277A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki