Title:
光学薄膜の成膜方法及び成膜装置
Document Type and Number:
Japanese Patent JP4727102
Kind Code:
B2
Inventors:
Toshihiro Suzuki
Noriaki Tani
Satoru Ikeda
Hiroaki Kawamura
Akatsuki Ishibashi
Noriaki Tani
Satoru Ikeda
Hiroaki Kawamura
Akatsuki Ishibashi
Application Number:
JP2001297240A
Publication Date:
July 20, 2011
Filing Date:
September 27, 2001
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/34; G02B5/18
Domestic Patent References:
| JP6291375A | ||||
| JP11172430A |
Foreign References:
| WO2001069665A1 |
Attorney, Agent or Firm:
Yoshihiro Shimizu
Shinichi Abe
Yuji Tsujida
Etsuo Machida
Masashi Yoshioka
Shinichi Abe
Yuji Tsujida
Etsuo Machida
Masashi Yoshioka