Title:
被処理体の真空保持装置
Document Type and Number:
Japanese Patent JP4727810
Kind Code:
B2
More Like This:
| JPH05238557 | AUTOMATIC LINING DEVICE FOR DEFORMED BLANK MATERIAL |
| WO/2019/108672 | MECHANSIM FOR EXCHANGING CONCENTRIC SUCTION CUPS |
| JP2020013941 | COMPONENT MOUNTING DEVICE |
Inventors:
Shuji Akiyama
Hiroki Hosaka
Hiroki Hosaka
Application Number:
JP2000399183A
Publication Date:
July 20, 2011
Filing Date:
December 27, 2000
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B25J15/06; H01L21/677; B65G49/07; H01L21/68
Domestic Patent References:
| JP11274264A | ||||
| JP11163093A | ||||
| JP10070936A | ||||
| JP2000183142A |
Attorney, Agent or Firm:
Hajime Ohara