Title:
荷電粒子レンズを備えたビーム光学コンポーネント
Document Type and Number:
Japanese Patent JP4731496
Kind Code:
B2
Abstract:
The present invention relates to a beam optical component including a charged particle lens (1; 1000) for focusing a charged particle beam (3), the charged particle lens (1; 1000) comprising a first element (5; 1005) having a first opening (7) for focusing the charged particle beam (3); a second element (9; 1009) having a second opening (11) for focusing the charged particle beam (3); and first driving means (13) connected with at least one of the first element (5; 1005) and the second element (9; 1009) for aligning the first opening (7) with respect to the second opening (11). With the first driving means, the first opening (7) and the second opening (11) can be aligned with respect to each other during beam operation to provide a superior alignment of the beam optical component for a better beam focussing. The present invention also relates to a charged particle beam device that uses said beam optical component for focussing the charged particle beam (3), and a method to align first opening (7) and second opening (11) with respect to each other.
Inventors:
Frosin Juergen
Application Number:
JP2006549907A
Publication Date:
July 27, 2011
Filing Date:
December 13, 2004
Export Citation:
Assignee:
ICT Integrated Circuit Testing Gesell Shaft Feer Hull Priter Brief Tehnik M B Her
International Classes:
H01J37/28; H01J37/12; H01J37/14; H01J37/141; H01J37/15
Domestic Patent References:
| JP2158042A | ||||
| JP10012176A | ||||
| JP8138599A | ||||
| JP2002216686A | ||||
| JP2002507045A | ||||
| JP3263748A | ||||
| JP4144048A | ||||
| JP61066351A | ||||
| JP58041570U | ||||
| JP2001345260A | ||||
| JP2000149850A |
Foreign References:
| US3560781 | ||||
| US2581446 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato