Title:
表面処理装置
Document Type and Number:
Japanese Patent JP4731758
Kind Code:
B2
Inventors:
Akihiro Egami
Ikeda Makoto
Yasumi Sago
Yukito Nakagawa
Ikeda Makoto
Yasumi Sago
Yukito Nakagawa
Application Number:
JP2001238280A
Publication Date:
July 27, 2011
Filing Date:
August 06, 2001
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
H01L21/3065; H05H1/46; B01J19/08; C23C16/509; H01L21/205; H01L21/302; H01L21/31
Domestic Patent References:
| JP6330311A | ||||
| JP11283926A | ||||
| JP2003049274A |
Foreign References:
| WO1999048130A1 |
Attorney, Agent or Firm:
Tamiya Hiroshi