Title:
ジンバル機構を備えた転写装置及び同装置を用いた転写方法
Document Type and Number:
Japanese Patent JP4732800
Kind Code:
B2
More Like This:
Inventors:
Mitsunori Kokubo
Kentaro Ishibashi
Kentaro Ishibashi
Application Number:
JP2005152738A
Publication Date:
July 27, 2011
Filing Date:
May 25, 2005
Export Citation:
Assignee:
Toshiba Machine Co., Ltd.
International Classes:
B29C59/02; B81C99/00; H01L21/027
Domestic Patent References:
| JP4319414A | ||||
| JP8259245A | ||||
| JP63261405A | ||||
| JP2005052841A | ||||
| JP2004291607A | ||||
| JP2001135634A | ||||
| JP2004103232A | ||||
| JP2005101201A | ||||
| JP2007296530A | ||||
| JP2003224154A | ||||
| JP11314231A |
Foreign References:
| WO2004093171A1 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu