Title:
三軸磁気センサおよびその製造方法
Document Type and Number:
Japanese Patent JP4735304
Kind Code:
B2
Abstract:
To provide a triaxial magnetic sensor of structure manufacturable in a single chip.
This triaxial magnetic sensor 10 comprises a substrate 11 made of quartz or silicon, and 12 pieces of GMR elements in total each consisting of four X-axis GMR elements 12a-12d, Y-axis GMR elements 12e-12h, and Z-axis GMR elements 12i-12l, are formed on the substrate 11. The GMR elements of the Z-axis sensors 12i-12l are formed on the slope formed on the substrate 11 so that the direction of magnetization is within the slope. An LSI and a wiring layer are built in the substrate 11.
COPYRIGHT: (C)2007,JPO&INPIT
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Inventors:
Hideki Sato
Masayoshi Omura
Masayoshi Omura
Application Number:
JP2006032124A
Publication Date:
July 27, 2011
Filing Date:
February 09, 2006
Export Citation:
Assignee:
Yamaha Corporation
International Classes:
G01R33/09; H01L27/22; H01L43/08
Domestic Patent References:
| JP2004006752A | ||||
| JP2004193540A |
Attorney, Agent or Firm:
Takamori Suzuki
Yasuo Asami
Hideo Takahashi
Yoshitaka Takeyama
Eiichi Sobue
Yasuo Asami
Hideo Takahashi
Yoshitaka Takeyama
Eiichi Sobue