Title:
荷電粒子検出器、集束イオンビーム・システム、イオン-電子変換器および正または負に荷電した粒子を検出する方法
Document Type and Number:
Japanese Patent JP4740422
Kind Code:
B2
Abstract:
A particle detector switchable from an ion detector to an electron detector includes an ion-to-electron converter and a scintillator detector. With one set of voltages on the components, the converter has minimal impact on the electron trajectories so the electrons are efficiently detected by the scintillator detector. With different voltage settings on the components, the detector can be operated in positive ion mode to collect positive ions with adequate efficiency for most FIB applications. The ion-to-electron converter is preferably in the shape of a cylinder or includes multiple parallel plates
Inventors:
Robert El Jarratch
Mark Wutroth
Trevor Dingle
Marek Unchovsky
Mark Wutroth
Trevor Dingle
Marek Unchovsky
Application Number:
JP2006517687A
Publication Date:
August 03, 2011
Filing Date:
June 25, 2004
Export Citation:
Assignee:
F-I-I Company
International Classes:
G01T7/00; G01N23/225; G01T1/20; G01T1/28; H01J37/244; H01J37/30; H01J43/06; H01J49/02; H01J
Domestic Patent References:
| JP63108156U | ||||
| JP7142022A | ||||
| JP8250060A | ||||
| JP6168692A |
Attorney, Agent or Firm:
Masahiko Amagai