Title:
プローブの研磨部材
Document Type and Number:
Japanese Patent JP4745814
Kind Code:
B2
Abstract:
In a probe polishing method, a plurality of probes, which are arranged on a probe card for performing an inspection of electrical characteristics of a target object, are polished by using a polishing member. Further, the probes are polished over plural times, while changing a relative position of the abrasive sheet with respect to the probe card.
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Inventors:
Masato Kobayashi
Application Number:
JP2005364879A
Publication Date:
August 10, 2011
Filing Date:
December 19, 2005
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01R1/06; G01R31/26; H01L21/66
Domestic Patent References:
| JP11145219A | ||||
| JP11054572A | ||||
| JP2516377B2 | ||||
| JP2004304185A | ||||
| JP10300777A |
Attorney, Agent or Firm:
Hajime Ohara