Title:
ステージ装置
Document Type and Number:
Japanese Patent JP4750090
Kind Code:
B2
Abstract:
The vibrations of a second table supported on a first table that is movable in one horizontal direction can be controlled. A stage device includes an XY axis table movable in the X-direction, a Z-axis table supported by a support portion on the XY axis table, a pair of scales that are arranged apart from each other in the X-direction and detect the Z-direction velocity on the Z-axis table, a pair of motors that are arranged apart from each other in the X-direction and drive the Z-axis table in a vertical direction on the Z-axis-table, and a controller controls the drives of the motors based on the Z-direction velocity detected, in which the behavior of pitching vibrations in the Z-axis table is determined by detecting the Z-direction velocity with the scales, and the motors are driven and then the Z-axis table is rotated in a pitching direction so that the pitching vibrations are cancelled.
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Inventors:
Ryuta Nakajima
Hidehiko Mashita
Hidehiko Mashita
Application Number:
JP2007239901A
Publication Date:
August 17, 2011
Filing Date:
September 14, 2007
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
H01L21/027; G05D3/00; G12B5/00
Domestic Patent References:
| JP2007027659A | ||||
| JP6148361A | ||||
| JP2005025695A | ||||
| JP9293773A | ||||
| JP2005301936A | ||||
| JP11218941A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Yoshiki Kuroki